PiezoMEMS Analyzer

New PiezoMEMS Analyzer

Thin-piezoelectric-film technology is leaving the laboratory to become commercial PiezoMEMS Analyzer. Much thicker bulk capacitors are being embedded as actuators and sensors inside their own electronic circuitry. Multidisciplinary teams of mechanical, electrical, and reliability engineers now work alongside materials engineers to create new and novel devices. Classic engineering tools such as impulse response, impedance analysis, and resonance characterization must be integrated with traditional polarization, piezoelectric, pyroelectric, and magnetoelectric measurements. To control circuits containing embedded ferroic capacitors, asynchronous or semi-synchronous digital and analog functions must run independent-of or in-parallel-with crystal-clock-controlled ferroic measurements. Communication with embedded controllers and custom digital circuitry is critical. Together these requirements demand an extremely complex test environment.

Radiant Technologies’ Precision PiezoMEMS Analyzer integrates digital, analog, and communications circuit functions with the existing non-linear materials measurement capabilities of the Precision Multiferroic Non-linear Materials Tester, all supervised by Radiant’s Vision programmable test environment. The PiezoMEMS Analyzer not only measures piezoelectric properties of actuator and sensor elements of a commercial product, it will communicate with the product’s electronic logic, talk to embedded microprocessors, supply asynchronous voltages and pulses, and measure sensor frequencies.

The PiezoMEMS Analyzer combines the following capabilities:

A fully functional, high speed, non-linear ferroic properties tester ranging up to +/-200V capable of Hysteresis, PUND, Leakage, CV, piezoelectric displacement, thermal, and magnetoelectric measurements. The PiezoMEMS Analyzer is expandable to 10kV.

Asynchronous/semi-synchronous ±10V arbitrary analog pulse generator with programmable delay.

An asynchronous 16-bit, ±10V, 1012 ohm input-impedance voltage measurement port.

Independent ±10V 25mA DC bias generator.

60 MHz frequency counter for measuring oscillator circuits.

[15 Out x 8 In/Out ] parallel digital port for setting, controlling, and reading digital ICs or communicating with microprocessors.

Arbitrary I2C custom programmable I/O for communicating with I2C capable microprocessors and logic circuits.

Built in LCR impedance measurement port.

Frequency Range: 10 khz

Output Range +/-100V or +/-200V expandable to 10kV

  • 16-bit Arbitrary Waveform Generator output
  • 270KHz @ +/-100V and 100KHz @+/-200V built-in
  • Accuracy 0.5% or Better
  • Maximum Data Points 32000
  • Minimum Pulse Widths down to 0.5µs
  • Maximum Pulse Widths down to 1µs and up to 1s
  • Vision controlled output ramp for maximum accuracy

Polarization Measurement under AC & DC Magnetic Fields

  • 18-bit Resolution (analog to digital converters)
  • 0.5µs capture rate with 0.1µs interlace facility
  • Polarization, output voltage and SENSORs captured simultaneously
  • Minimum charge sensitivity -> 0.80fC
  • Minimum PZT capacitor area -> 0.5u2
  • Maximum Area Resolution 52.6mC
  • Maximum Area Resolution >130cm2 w/o HVI attached)
  • Maximum hysteresis loop frequency ->270KHz
  • Minimum hysteresis loop frequency -> 1/30th Hz

Includes Vision Software